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发明名称
Pellicle and method for manufacturing the same
摘要
申请公布号
EP2051139(B1)
申请公布日期
2010.11.24
申请号
EP20080017973
申请日期
2008.10.14
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
KUBOTA, YOSHIHIRO;AKIYAMA, SHOJI;SHINDOO, TOSHIHIKO
分类号
G03F1/24;G03F1/62
主分类号
G03F1/24
代理机构
代理人
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