Vacuum pump

摘要

The pump (1) has a side channel pumping stage (4) comprising running wheels (400) with an edge and vanes (402), where the wheels are displaced during rotation. The vanes exhibit a rear side with an outer edge. The vanes comprise flanges at the outer edge of the rear side. A middle rod is provided between the vanes and other vane. The former vanes comprise two vane sections, which are arranged in a movement direction. The former vanes are arranged at the edge of the wheels in a radial direction. The rear side and the flanges comprise flat surfaces.