| 发明名称 |
Novel resins and photoresist compositions comprising same |
| 摘要 |
<p>Provided are new resins that comprise lactone units and photoresist compositions that comprise such resins.</p> |
| 申请公布号 |
EP2253647(A1) |
申请公布日期 |
2010.11.24 |
| 申请号 |
EP20100163278 |
申请日期 |
2010.05.19 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, LLC |
发明人 |
XU, CHENG-BAI;ZAMPINI, ANTHONY |
| 分类号 |
C08F20/10;C08F220/30;G03F7/039;H01L21/027 |
主分类号 |
C08F20/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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