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发明名称
MEMS Sensor And Production Method
摘要
申请公布号
KR100996157(B1)
申请公布日期
2010.11.24
申请号
KR20077025705
申请日期
2007.01.10
申请人
发明人
分类号
H04R19/00
主分类号
H04R19/00
代理机构
代理人
主权项
地址
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