MICROWAVE PLASMA CVD SYSTEM,申请号EP20070707612-传众专利搜索

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发明名称	MICROWAVE PLASMA CVD SYSTEM
摘要
申请公布号	EP2108714(A4)	申请公布日期	2010.11.24
申请号	EP20070707612	申请日期	2007.01.29
申请人	SUMITOMO ELECTRIC INDUSTRIES, LTD.	发明人	UEDA, AKIHIKO;MEGURO, KIICHI;YAMAMOTO, YOSHIYUKI;NISHIBAYASHI, YOSHIKI;IMAI, TAKAHIRO
分类号	C23C16/511;C30B29/04;H01L21/205	主分类号	C23C16/511
代理机构		代理人
主权项
地址

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