发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE: A method of manufacturing a semiconductor device is provided to improve the reliability of a semiconductor device by suppressing a metal foreign material in etching. CONSTITUTION: A gate line(202) is formed on the top of a semiconductor substrate(200). Gate lines are formed in a die(DI) region. The gate lines are formed in various forms according to the kind of the semiconductor. A junction area is formed on the semiconductor between the gate lines and electrically connects the gate lines.</p>
申请公布号 KR20100123446(A) 申请公布日期 2010.11.24
申请号 KR20090042670 申请日期 2009.05.15
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, YOUNG MO
分类号 H01L21/78;H01L21/027;H01L21/301 主分类号 H01L21/78
代理机构 代理人
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