发明名称 SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD, AND ELECTRONIC DEVICE
摘要 <p>The objective is to improve capabilities such as high-speed switching of a compound semiconductor device. Provided is a semiconductor wafer comprising a silicon wafer; an insulating film that is formed on the silicon wafer and that has an open portion reaching the silicon wafer; a Ge crystal formed in the open portion; a seed compound semiconductor crystal that is grown with the Ge crystal as a nucleus and that protrudes beyond a surface of the insulating film; and a laterally grown compound semiconductor layer that is laterally grown on the insulating film with a specified surface of the seed compound semiconductor crystal as a seed surface.</p>
申请公布号 KR20100123680(A) 申请公布日期 2010.11.24
申请号 KR20107016272 申请日期 2009.02.27
申请人 SUMITOMO CHEMICAL CO., LTD. 发明人 HATA MASAHIKO;TAKADA TOMOYUKI
分类号 H01L21/20;H01L21/336;H01L29/78 主分类号 H01L21/20
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