发明名称 APPARATUS FOR TREATING SURFACE OF SUBSTRATE AND METHOD FOR TREATING THE SAME
摘要 PURPOSE: A substrate surface treatment device and a method thereof are provided to reduce a stripe-shaped curve on the surface of a substrate by maximizing the anisotropic etching effect of the curve by using a HF series solution. CONSTITUTION: A glass substrate, in which a plurality of curves are formed, is injected. The glass substrate, in which a surface processing tank(133) is injected through a substrate injection part, is located. The surface processing tank includes a drug solution. A plurality of rollers transfer and return the glass substrates into the surface processing tank.
申请公布号 KR20100123196(A) 申请公布日期 2010.11.24
申请号 KR20090042274 申请日期 2009.05.14
申请人 LG DISPLAY CO.,LTD. 发明人 OH, KUM MI
分类号 H01L21/205 主分类号 H01L21/205
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