发明名称 Optical diffusers, photomasks and their methods of fabrication
摘要 A large mask with random apertures may be formed by forming a smaller mask (also called a cell mask) with a random pattern of transmissive apertures which is then repeatedly replicated to create the large mask. The random pattern may be created by perturbing the aperture locations by a small amount or the apertures may be randomly placed within the cell mask provided certain criteria are met. Alternatively, a large mask with a random pattern of transmissive apertures may be formed without using a cell mask. This large mask may be used to fabricate diffusers and other devices that do not suffer from the interference, diffraction and other optical effects common in devices having structures that are non-randomly patterned.
申请公布号 US7838204(B2) 申请公布日期 2010.11.23
申请号 US20090623529 申请日期 2009.11.23
申请人 LU ZHIJIAN 发明人 LU ZHIJIAN
分类号 G03F1/00 主分类号 G03F1/00
代理机构 代理人
主权项
地址