| 摘要 |
<p>PURPOSE: The pellicle desorption equipment and reticle cleaning solution using the same exhibits the pellicle desorption equipment for controlling the residue of adhesive in the desorption of pellicle and reticle cleaning solution using the same. CONSTITUTION: In the reticle(300), the frame in which the pellicle(700) is attached is attached with adhesive to the adhesion domain of the front side. In the housing, reticle is introduced. The heating block(200) offers the radiant heat to the adhesion domain. The ultraviolet ray is examined in the surface of reticle and the surface is hydrophilized.</p> |
