| 摘要 |
PURPOSE: The gate valve keeps the valve body without the active force of actuator in the substrate carry-out entrance with the state pressurized. CONSTITUTION: It prepares so that the housing(202) surround the substrate carry-out entrance with the sidewall of the chamber(100). The valve body(210) prepares in the housing to be ascended and descended. The valve body opens and closes the substrate carry-out entrance. In the location in which the elevating-drive means faces in the substrate carry-out entrance and the between location evacuating from the substrate carry-out entrance, the valve body is raised.
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