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发明名称
TEMPERATURE ADJUSTING MECHANISM AND SEMICONDUCTOR MANUFACTURING APPARATUS USING TEMPERATURE ADJUSTING MECHANISM
摘要
申请公布号
KR20100122958(A)
申请公布日期
2010.11.23
申请号
KR20107023085
申请日期
2009.06.30
申请人
TOKYO ELECTRON LIMITED
发明人
NISHIMOTO SHINYA
分类号
H05H1/46;H01L21/205;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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