发明名称 |
Assembly comprising a radiation source, a reflector and a contaminant barrier |
摘要 |
An assembly including a radiation reflector and a contaminant barrier is disclosed. The contaminant barrier is arranged to receive radiation from a radiation source and to reflect that radiation towards the radiation reflector, and the radiation reflector is arranged to reflect the radiation, received from the contaminant barrier, back towards the contaminant barrier.
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申请公布号 |
US7839482(B2) |
申请公布日期 |
2010.11.23 |
申请号 |
US20070802258 |
申请日期 |
2007.05.21 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
SOER WOUTER ANTHON;VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS |
分类号 |
G03B27/52;G03B27/54;G03B27/72 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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