发明名称 Method for manufacturing semiconductor device
摘要 A method for manufacturing a semiconductor device having flexibility by separating an element that is manufactured by a comparatively low-temperature (temperature of less than 500° C.) process from a substrate is provided. The element is separated from a glass substrate by the following steps: forming a silicone layer over a glass substrate; performing plasma treatment to the surface of the silicone layer to weaken the surface of the silicone layer; stacking an organic compound layer over the silicone layer; and forming an element that is manufactured through a process at a comparatively low-temperature, typically, a temperature that the organic compound can withstand, over the compound layer.
申请公布号 US7838328(B2) 申请公布日期 2010.11.23
申请号 US20080197482 申请日期 2008.08.25
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 ISA TOSHIYUKI
分类号 H01L51/40 主分类号 H01L51/40
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