发明名称 Capacitor structure
摘要 The capacitor structure includes a first electrode having a plurality of teeth protruding in a comb shape from an electrode base of a first electrode line and a second electrode having a plurality of teeth protruding in a comb shape from an electrode base of a second electrode line, both formed in a first wiring layer. The first and second electrodes face each other with their teeth interdigitated with each other via a dielectric. At least one of the teeth of the first electrode is electrically connected with a third electrode line formed in a second wiring layer.
申请公布号 US7838919(B2) 申请公布日期 2010.11.23
申请号 US20080056674 申请日期 2008.03.27
申请人 PANASONIC CORPORATION 发明人 OKAMOTO KIYOMI;SUGIOKA TETSUROU;ADACHI KAZUKI
分类号 H01L21/8242;H01G4/33;H01L27/108 主分类号 H01L21/8242
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