METHOD OF GAP FILLING IN A NANOSTRUCTURES AND METHOD OF MAUFACTURING FOR OLED USING THE SAME
摘要
PURPOSE: A gap filling method of a nanostructure and a manufacturing method of an organic light-emitting device(OLED) using thereof are provided to form an oxide thin film with a flat surface by pressing a gap of the nanostructure with a mold. CONSTITUTION: A gap filling method of a nanostructure comprises the following steps: supplying a substrate with the nanostructure including a gap on the upper side(S1); spreading a coating composition to fill the gap(S2); pressing the layer of the coating composition with a mold(S3); irradiation ultraviolet rays to the coating composition layer(S4); heating the layer to form a metal oxide thin film; and separating the mold from the metal oxide thin film(S5).
申请公布号
KR100995897(B1)
申请公布日期
2010.11.22
申请号
KR20100009904
申请日期
2010.02.03
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS
发明人
JEON, SO HEE;PARK, HYEONG HO;JEONG, JUN HO;KIM, KI DON;CHOI, JUN HYUK;LEE, JI HYE;PARK, SEONG JE;CHOI, DAE GEUN;KIM, SA RAH