VISION INSPECTION APPARATUS AND VISION INSPECTION METHOD THEREFOR

摘要

PURPOSE: A vision-inspection apparatus for a semiconductor device and a method for the same are provided to improve the speed of a vision-inspection by integrating a two-dimensional vision-inspection part and a three-dimensional vision-inspection part into one module. CONSTITUTION: A vision-inspection part(50) acquires the image of a semiconductor device(1) and analyzes the acquired image. Second-dimensional light source(710) radiates light toward a target surface which is either of the upper side or the lower side of the semiconductor device. A second-dimensional vision-inspection part includes a second-dimensional camera in order to take an image from the target surface. Three-dimensional light source(810) radiates light toward the target surface.