BIO FILTER, APPARATUS FOR MEASURING MATERIAL AND METHOD FOR MANUFACTURING BIO FILTER

摘要

PURPOSE: A bio-filter, apparatus for measuring sample and a method for manufacturing the bio-filter are provided to improve porosity and durability. CONSTITUTION: A method for manufacturing a bio-filter comprises: a step of forming a porous layer through anodic reaction; a step of removing micropore and anodized film of porous layer; and a step of forming a pattern at the rear side of a sample and etching. The sample is p-type silicon. A bio-filter comprises a porous layer in which micropore and anodized film is removed, an oxide film formed around the sample; and a etched membrane.