| 摘要 |
FIELD: electricity. ^ SUBSTANCE: extensive electroarc evaporator of current-conducting materials comprises vacuum chamber, being an anode, cooled cathode of electroarc discharge extended along its longitudinal axis, made of evaporated material and having working evaporation surface arranged along longitudinal axis, and current contact jaws arranged at the opposite ends of cathode and connected to controlled keys electrically connected via individual connection elements and via sensors of cathode spot position with control unit, and connected to DC source connected to anode. It is electrically insulated from anode and cathode by screen of evaporator and is arranged with the possibility of protection against generation of electric arc between walls of vacuum chamber and non-working surfaces of electroarc evaporator of metals, between screen and walls of chamber, and between screen and cathode. ^ EFFECT: safety device of evaporator is arranged with the possibility of power supply disconnection from cathode as it is closed with screen. ^ 11 cl, 1 dwg |
