| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier that can detect even a substrate in a substrate carrying container of different size without changing installation area or layout of the device and without changing to a robot to which a dedicated substrate detection device is attached in accordance with a substrate size. SOLUTION: The substrate carrier includes a substrate detection device 13 installed at a predetermined position within an operation area of a substrate carrying robot 7, which in turn holds the substrate detection device 13 when detecting a substrate to detect the substrate, and returns the substrate detection device 13 to the predetermined position after the detection. COPYRIGHT: (C)2011,JPO&INPIT
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