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发明名称
HOCHREINE ALUMINIUM-SPUTTERTARGETS
摘要
申请公布号
DE60237911(D1)
申请公布日期
2010.11.18
申请号
DE20026037911
申请日期
2002.10.23
申请人
PRAXAIR S.T. TECHNOLOGY INC.
发明人
PERRY, ANDREW C.;GILMAN, PAUL S.;HUNT, THOMAS J.
分类号
C22F1/04;C22C21/00;C23C14/34
主分类号
C22F1/04
代理机构
代理人
主权项
地址
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