发明名称 SEMICONDUCTOR DEVICE COMPRISING METAL GATES AND A SILICON CONTAINING RESISTOR FORMED ON AN ISOLATION STRUCTURE
摘要 <p>In a semiconductor device comprising sophisticated high-k metal gate structures formed in accordance with a replacement gate approach, semiconductor-based resistors may be formed above isolation structures (103D) substantially without being influenced by the replacement gate approach. Consequently, enhanced area efficiency may be achieved compared to conventional strategies, in which the resistive structures may have to be provided on the basis of a gate electrode metal, while, nevertheless, a low parasitic capacitance may be accomplished due to providing the resistive structures above the isolation structure.</p>
申请公布号 WO2010132283(A1) 申请公布日期 2010.11.18
申请号 WO2010US33967 申请日期 2010.05.07
申请人 GLOBALFOUNDRIES INC.;WEI, ANDY;WAITE, ANDREW 发明人 WEI, ANDY;WAITE, ANDREW
分类号 H01L21/8238;H01L21/02;H01L27/06 主分类号 H01L21/8238
代理机构 代理人
主权项
地址