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发明名称
INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号
NL2004688(A)
申请公布日期
2010.11.18
申请号
NL20102004688
申请日期
2010.05.10
申请人
ASML NETHERLANDS B.V.,
发明人
WIT, JOHANNES;SINKE, ARNOLD;TAS, MARNIX;HUGERS, RONALD
分类号
G01N21/47;G03F7/20
主分类号
G01N21/47
代理机构
代理人
主权项
地址
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