发明名称 SUPERLATTICE DEVICE, METHOD OF MANUFACTURING THE SAME, SOLID-STATE MEMORY INCLUDING THE SUPERLATTICE DEVICE, DATA PROCESSING SYSTEM, AND DATA PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a superlattice device of which the crystalline structure is rapidly replaced by application of low energy. SOLUTION: This superlattice device includes: a superlattice laminated 10 formed by laminating a crystal layer 1 of which the crystalline structure is reversibly replaced by application of energy, and a crystal layer 2 having a composition different from that of the crystal layer 1; and an orientation layer 3 being a base of the superlattice laminated 10 for subjecting the lamination surface of the crystal layer 1 to (111) orientation. According to this invention, the lamination surface of the crystal layer 1 can be subjected to the (111) orientation by using the orientation layer 3 as a base. In the crystal layer 1 of which the lamination surface is subjected to the (111) orientation, the crystalline structure thereof is irreversibly replaced by application of relatively low energy, whereby the characteristic of the superlattice device having such a crystal layer can be improved. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010263131(A) 申请公布日期 2010.11.18
申请号 JP20090113994 申请日期 2009.05.08
申请人 ELPIDA MEMORY INC 发明人 AIZAWA KAZUO;ASANO ISAMU;TOMINAGA JUNJI;KOLOBOV ALEXANDER;FONS PAUL;SIMPSON ROBERT
分类号 H01L27/10;H01L45/00 主分类号 H01L27/10
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