| 摘要 |
Provided is method of calibrating Y-axis direction position of contact tip of form measuring instrument including: table rotatable about Z-axis; contact tip capable of contacting workpiece; and contact tip driving means to drive contact tip in at least X- and Z-axis directions among X-, Y- and Z-axis directions perpendicular to one another. Method performs tracing measurement of inclined surface or inclined cylinder side surface which is part of workpiece obtained by inclining workpiece placed on table about Y-axis, or side surface of off-centered cylinder having center axis off-centered in X-axis direction by rotating surface to obtain measurement value at each angular position of rotation of table, obtains angular position of rotation at which smallest value among measurement values of tracing measurement is detected as angular position of rotation with smallest detected value, and adjusts Y-axis direction position of contact tip based on angular position of rotation with smallest detected value.
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