| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal type sensor having a simple constitution, high response speed, and excellent measurement accuracy even when being used for long time, concerning a laser power sensor. <P>SOLUTION: This laser power sensor for measuring output of laser light includes a photodetection part comprising: a planar light absorber for receiving laser light on one main surface; a heat conductor disposed in contact with a surface on the back of the main surface of the light absorber; and a thermopile for temperature detection disposed in contact with the heat conductor. The thermopile has on a substrate: a plurality of thin-film thermocouples connected in series; a connector part for connecting a conductor for outputting a voltage generated in the thin-film thermocouples; and a protection film laminated on the thin-film thermocouples. The plurality of thin-film thermocouples have each a hot contact disposed approximately on the center domain on the substrate at a fixed interval, and a cold contact disposed approximately on the center domain on the substrate at a fixed interval, and the hot contact has a contact with the heat conductor through the protection film. <P>COPYRIGHT: (C)2011,JPO&INPIT |
