发明名称 |
RETICLE MANIPULATION DEVICE |
摘要 |
A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.
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申请公布号 |
US2010292826(A1) |
申请公布日期 |
2010.11.18 |
申请号 |
US20100761499 |
申请日期 |
2010.04.16 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
BLATTNER JAKOB;FEDERICI RUDY;FOSNIGHT WILLIAM;HARIS CLINT |
分类号 |
G06F19/00;B65G1/00;B65G49/07;G03F7/20;G06F7/00;H01L |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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