| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner generating efficiently torsional vibration in a mirror with simple structure, by arranging a piezoelectric body, a magnetostrictive body or a permanent magnet on a substrate having a torsion beam part for supporting a mirror part, and by generating the torsional vibration on the mirror, using a plate wave of the substrate. SOLUTION: This optical scanner is constituted to form the torsion beam part on the substrate, and to swing the mirror part supported by the torsion beam part. The optical scanner is fixed or formed with the piezoelectric body, the magnetostrictive body or the permanent magnet, on one part of the substrate, and the mirror part supported on the torsion beam part is excited using the plate wave induced in the substrate by applying an electric voltage or a magnetic field onto the piezoelectric body, the magnetostrictive body or the permanent magnet. COPYRIGHT: (C)2011,JPO&INPIT |
