| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a vibrator for achieving a vibration wave driver of high reliability, and to provide the vibrator. <P>SOLUTION: The method of manufacturing the vibrator of the vibration wave driver using an oscillator where an electromechanical energy conversion element 6 is bonded to the vibrator 1 having a plurality of protrusions 1a includes the first process and the second process. In the first process, the elastic body material 1 having a plurality of the protrusions 1a is manufactured. In the second process, pressure in a direction opposite to a protruding direction of the protrusions 1a of the elastic body material 1 is added and at least part of the protrusions 1a is crushed so as to reduce a gap 1c between the adjacent protrusions. <P>COPYRIGHT: (C)2011,JPO&INPIT |
