| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow movement control of an engaging member to a predetermined position with respect to a driving device suitable for driving of particularly an XY moving stage, a photographing lens of a camera, a projection lens of an overhead projector, a lens of a binocular or the like for the driving device. <P>SOLUTION: A piezoelectric actuator 10 provided with a piezoelectric element 26 which is applied with a drive voltage to expand and contract, a dive member 28 to be driven by the piezoelectric element 26, the engaging member 30 engaged with the dive member 28 by predetermined friction force, a drive circuit 14 for driving the piezoelectric element 26 by a drive voltage formed of a rectangular wave, and a control part 22 for controlling the operation of the drive circuit 14 to relatively move the dive member 28 and the engaging member 30 by executing expansion and contraction of the piezoelectric element 26 at a different speed further includes a member sensor 16 for detecting the position of the engaging member 30. In the piezoelectric actuator 10, the control part 22 outputs a driving pulse having a predetermined duty ratio based on a signal from the member sensor 16 and in response to the driving pulse, the drive circuit 14 generates the rectangular wave, thereby driving the piezoelectric element 26. <P>COPYRIGHT: (C)2011,JPO&INPIT |
