| 摘要 |
PROBLEM TO BE SOLVED: To stably carry a carrying object such as a substrate by a simple device configuration in carrying the carrying object using a carrier for carrying a semiconductor substrate or the like for instance. SOLUTION: In the carrier for carrying a substrate, a non-contact suction pad 31 sucks the substrate of the carrying object from the upper surface side. Also, a substrate pressing part 33b provided in a substrate position control mechanism 33 presses the peripheral edge part of the substrate sucked by the non-contact suction pad 31 by energizing force generated by gravity and thereby regulates the movement of the substrate in the horizontal direction. COPYRIGHT: (C)2011,JPO&INPIT |
