WAFER TRANSFER OF WAFER INSPECTION SYSTEM FOR SCANNING ELECTRON MICROSCOPE

摘要

PURPOSE: A wafer transfer of wafer inspection system for scanning electron microscope is provided to prevent a wafer from floating and being separated from a wafer holder by a shutter plate on the wafer holder. CONSTITUTION: A wafer is provided at a station holder(10). A wafer holder(20) receives a wafer and guides it to main inspection chamber. A shutter plate unit is arranged on the wafer holder, and includes a shutter plate(31). A wafer transfer arm(40) transfers the wafer to the station holder and the both sides of the wafer holder.