发明名称 OPTICAL IMAGING SYSTEM
摘要 A method of scanning a pattern on a surface, the method comprises forming a first spatially modulated light beam including a pattern for writing on a surface; splitting the first spatially modulated light beam into a plurality of sub-beams; altering a spatial relationship between the plurality of sub-beams, thereby forming a second spatially modulated light beam; and canning the surface with the second spatially modulated light beam.
申请公布号 WO2010131239(A1) 申请公布日期 2010.11.18
申请号 WO2010IL00320 申请日期 2010.04.22
申请人 ORBOTECH LTD.;KATZIR, YIGAL;MEIMOUN, ELIE 发明人 KATZIR, YIGAL;MEIMOUN, ELIE
分类号 B41J2/47 主分类号 B41J2/47
代理机构 代理人
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