| 摘要 |
An optical apparatus, having a lens which is irradiated with an exposure light, includes a light source which emits a non-exposing light having a wavelength region different from that of the exposure light, an irradiation unit which irradiates a part of a surface of the lens with the non-exposing light emitted by the light source, an acousto-optic modulation element which is arranged between the light source and the surface of the lens, and an AOM driving system which drives the acousto-optic modulation element to change the irradiation position of the non-exposing light with respect to the surface of the lens. The optical apparatus can change the irradiation position of the light flux with respect to the optical element, with a simple construction or without generating any vibration.
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