发明名称 METHOD AND MATERIAL FOR MAKING MONOLITHIC POROUS PAD CAST ONTO ROTATABLE BASE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method and material for making a brush or pad for removing materials, particles, or chemicals from a substrate. <P>SOLUTION: The brush or pad includes a rotatable base for supporting a porous pad material. The base includes an inner surface and an outer surface, and a plurality of channels in the base for interlocking the porous pad material with the base. The porous pad material covers at least a portion of the outer surface of the base and is used for removing materials from various substrates. The porous pad material fills one or more of the channels in the base and interlocks the porous pad material with the base. Preferably the channels fluidly connect the inner surface with the outer surface of the base and aid in the alignment of porous pad nodes and the distribution of fluid within the porous pad. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2010263241(A) 申请公布日期 2010.11.18
申请号 JP20100177535 申请日期 2010.08.06
申请人 ENTEGRIS INC 发明人 BENSON BRIANT ENOCH
分类号 H01L21/304;B08B1/04;B24D3/32;B24D5/10 主分类号 H01L21/304
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