发明名称 OPTICAL ILLUMINATION APPARATUS FOR ILLUMINATING A SAMPLE WITH A LINE BEAM
摘要 An optical system for illuminating a sample with a line beam comprises a light source (24), a beam shaper (30) for transforming the beam of light emitted by the light source into an intermediate astigmatic image and an imaging system for transforming the intermediate astigmatic image into a final astigmatic image and for illuminating the sample. The beam shaper provides different non-unity magnifications in a lateral plane and in a transversal plane, and comprises a toroidal entrance surface for implementing the angular magnification and angular reduction and a toroidal exit surface with finite radii of curvature. The invention enables the use of existing beam shaping apparatus, normally used to make a light output have a more circular cross section, in combination with the imaging system, in order to provide line beam illumination of a sample.
申请公布号 US2010288942(A1) 申请公布日期 2010.11.18
申请号 US20080743824 申请日期 2008.11.19
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 VAN DIJK ERIK MARTINUS HUBERTUS PETRUS;STALLINGA SJOERD
分类号 G01J1/58;G02B27/09;H01J3/14 主分类号 G01J1/58
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