| 摘要 |
<p>Disclosed is a piezoelectric actuator which comprises a pair of center beams, a pair of meandering beams, and a fixing frame. The pair of center beams extend in a first direction and are connected to an object to be driven, thereby supporting the object to be driven, from both sides thereof in the first direction. The pair of meandering beams include zigzag beam groups wherein the mutually adjacent end sections of a plurality of beams extending in parallel to the second direction orthogonal to the first direction are alternately connected at both ends and the beams are each provided with a piezoelectric element, so that the angles of inclination in the second direction can be accumulated by the elongation and contraction of the piezoelectric elements. The fixing frame surrounds the object to be driven, the center beams, and the meandering beams. The pair of meandering beams, the respective one end of which is connected to the fixing frame while the other end is connected to the end of one of the center beams farther from the position connected with the fixing frame, are arranged symmetrically so as to surround the object to be driven and the center beams from both sides thereof.</p> |
