CONTACTLESS CONVEYANCE DEVICE, CONTACTLESS CONVEYANCE METHOD, AND CONTACTLESS CONVEYANCE SYSTEM

摘要

A flexurally vibrating plate (10) which is formed in a long flat plate-like shape is ultrasonically vibrated at two positions in the longitudinal direction thereof by exciting a pair of ultrasonic vibrators (30A, 30B) by means of an electric signal. A micro-object (50) to be conveyed is made to be caught at a node of an ultrasonic standing wave which is generated in the space sandwiched between the flexurally vibrating plate (10) and a reflection plate (20). The phase of the electric signal for exciting the pair of ultrasonic vibrators (30A, 30B) is controlled to vibrate the flexurally vibrating plate (10) so that a traveling wave is produced in the flexurally vibrating plate, and the micro-object (50) to be conveyed which is caught at the node of the ultrasonic standing wave is conveyed in the longitudinal direction of the flexurally vibrating plate (10).