CONVEYANCE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a levitation conveyance device with a novel configuration which solves a problem that the prompt and high accuracy stop of a substrate by the adjustment of the friction resistance with a roller or of the gas feeding direction of a gas is very difficult. SOLUTION: This levitation conveyance device includes: a first levitation conveyance device comprising a pressing conveyance unit having a levitation unit for levitating the substrate by jetting gas and a receiving conveyance unit; and a second levitation device which is disposed continuously with the first conveyance device and comprises a pressing conveyance unit having a levitating unit for levitating the substrate and a receiving conveyance unit. COPYRIGHT: (C)2011,JPO&INPIT