| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive light wave interference measuring device. SOLUTION: In this light wave interference measuring device, each interference signal of a test light flux emitted from a first multiple-wavelength light source and reflected by a test surface and a reference light flux emitted from a second multiple-wavelength light source having a wavelength different from that of the first multiple-wavelength light source and reflected by a reference surface is detected, and an optical path length difference between the reference surface and the test surface is measured. The first multiple-wavelength light source and the second multiple-wavelength light source have a light source having a wideband wavelength and an optical filter. COPYRIGHT: (C)2011,JPO&INPIT
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