发明名称 |
INTEGRATION OF VACUUM MICROELECTRONIC DEVICE WITH INTEGRATED CIRCUIT |
摘要 |
A device includes an integrated circuit (IC) and at least one ultra-small resonant structure formed on said IC. At least the ultra-small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure portion of the device may be grounded or connected to a known electrical potential. The ultra-small resonant structure may be electrically connected to the underlying IC, or not.
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申请公布号 |
US2010289099(A1) |
申请公布日期 |
2010.11.18 |
申请号 |
US20100843415 |
申请日期 |
2010.07.26 |
申请人 |
VIRGIN ISLANDS MICROSYSTEMS, INC. |
发明人 |
GORRELL JONATHAN |
分类号 |
H01L31/02;H01L31/18 |
主分类号 |
H01L31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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