发明名称 |
ATOM PROBE DATA AND ASSOCIATED SYSTEMS AND METHODS |
摘要 |
The present invention relates to atom probe data and associated systems and methods. Aspects of the invention are directed toward a computing system configured to predict a characteristic associated with an atom probe specimen that includes a data set receiving component configured to receive a three-dimensional data set associated with a portion of the specimen. The system further includes a predicting/calculating component configured to predict the characteristic associated with the specimen based on the data set. Other aspects of the invention are directed toward a method for evaluating a manufacturing process using atom probe data that includes receiving a three-dimensional data set associated with a portion of a microelectronic assembly produced by a manufacturing process. The method further includes determining a variation between the data set and a configuration expected to result from the manufacturing process.
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申请公布号 |
US2010288926(A1) |
申请公布日期 |
2010.11.18 |
申请号 |
US20070294716 |
申请日期 |
2007.03.27 |
申请人 |
WIENER SCOTT A;KELLY THOMAS F;LARSON DAVID J;THOMPSON KEITH J;ULFIG ROBERT M;GEISER BRIAN P;KUNICKI THOMAS C;O'NEILL RAYMOND W;SCHNEIR JASON |
发明人 |
WIENER SCOTT A.;KELLY THOMAS F.;LARSON DAVID J.;THOMPSON KEITH J.;ULFIG ROBERT M.;GEISER BRIAN P.;KUNICKI THOMAS C.;O'NEILL RAYMOND W.;SCHNEIR JASON |
分类号 |
G01B21/30 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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