| 摘要 |
PROBLEM TO BE SOLVED: To provide intensity compensation of replaceable chromatic point sensor components. SOLUTION: A method is provided for providing compensation to nonuniform responses from light source and wavelength detector subsystem of the chromatic point sensor (CPS). Light from the light source bypasses measured route passing through the CPS optical pen to provide the wavelength detector with detour light, being input into an optical path which provides unprocessed intensity profile distributed over pixels of the detector. Thus a set of resultant generated unprocessed intensity profile signals are analyzed to determine a set of error compensation coefficients on wavelength-dependent intensity variation generated in the unprocessed intensity profile signal. Thereafter by applying these error compensation coefficients, strain and asymmetry property, which may be generated on shape of signal in peak region of CPS distance measurement profile signal data unless this invention is used, can be reduced. In various embodiments, the released method can provide the CPS components with improved accuracy, robustness, field test and exchangeability. COPYRIGHT: (C)2011,JPO&INPIT |
