发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To improve reliability of a semiconductor device including a bump electrode by preventing occurrence of a gap between the bump electrode and an insulation film. SOLUTION: This semiconductor device includes: a wiring electrode 1 formed on a semiconductor substrate; the insulation film 2 formed on the wiring electrode 1 and including an opening for exposing the wiring electrode 1; the bump electrode 3 formed on the wiring electrode 1 exposed from the opening of the insulation film 2; and a filling material 5 arranged between the insulation film 2 and the bump electrode 3. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010263137(A) 申请公布日期 2010.11.18
申请号 JP20090114280 申请日期 2009.05.11
申请人 RENESAS ELECTRONICS CORP 发明人 FUKUCHI KAZUHIRO
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址