METHOD FOR ASSEMBLING AT LEAST TWO PLATES AND USE OF SAID METHOD FOR MAKING AN IONIC SPUTTERING ASSEMBLY,申请号EP20080775661-传众专利搜索

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发明名称	METHOD FOR ASSEMBLING AT LEAST TWO PLATES AND USE OF SAID METHOD FOR MAKING AN IONIC SPUTTERING ASSEMBLY
摘要
申请公布号	EP2115181(B1)	申请公布日期	2010.11.17
申请号	EP20080775661	申请日期	2008.03.03
申请人	H.E.F.	发明人	MARTIN, MICHEL;MAURIN-PERRIER, PHILIPPE;HEAU, CHRISTOPHE;BLANDENET, OLIVIER
分类号	C23C14/00	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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