发明名称 A METHOD AND SYSTEM FOR SPECTRUM DATA ANALYSIS
摘要 <p>A method and system for spectrum data analysis. The method comprises the steps of collecting a spectrum of an unknown material; providing a set of element data templates; calculate optical least squares weights for the element data templates in approximating the spectrum; removing one or more of the templates having negative weights in approximating the spectrum; and re-calculating an approximation of the spectrum with said one or more templates removed.</p>
申请公布号 EP2250474(A2) 申请公布日期 2010.11.17
申请号 EP20090707645 申请日期 2009.02.06
申请人 FEI COMPANY 发明人 CORBETT, DANIEL ROY;GOTTLIEB, PAUL;OWEN, MICHAEL JAMES;MENZIES, ANDREW HARLEY
分类号 G01J3/28;G01J3/30;G01J3/46;G01N23/207;G01N23/223 主分类号 G01J3/28
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