发明名称 |
A METHOD AND SYSTEM FOR SPECTRUM DATA ANALYSIS |
摘要 |
<p>A method and system for spectrum data analysis. The method comprises the steps of collecting a spectrum of an unknown material; providing a set of element data templates; calculate optical least squares weights for the element data templates in approximating the spectrum; removing one or more of the templates having negative weights in approximating the spectrum; and re-calculating an approximation of the spectrum with said one or more templates removed.</p> |
申请公布号 |
EP2250474(A2) |
申请公布日期 |
2010.11.17 |
申请号 |
EP20090707645 |
申请日期 |
2009.02.06 |
申请人 |
FEI COMPANY |
发明人 |
CORBETT, DANIEL ROY;GOTTLIEB, PAUL;OWEN, MICHAEL JAMES;MENZIES, ANDREW HARLEY |
分类号 |
G01J3/28;G01J3/30;G01J3/46;G01N23/207;G01N23/223 |
主分类号 |
G01J3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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