Method for the injection of CMP slurry,申请号GB20090021428-传众专利搜索

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发明名称	Method for the injection of CMP slurry
摘要
申请公布号	GB2470246(A)	申请公布日期	2010.11.17
申请号	GB20090021428	申请日期	2009.12.07
申请人	ARACA, INC.	发明人	LEONARD BORUCKI;YASA SAMPURNO;SIAN THENG;ARA PHILIPOSSIAN
分类号	B24B57/02	主分类号	B24B57/02
代理机构		代理人
主权项
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