FABRICATION METHOD OF NANOPORE WITH BUILT-IN NANO-SCALE GATE PROBE

摘要

PURPOSE: A manufacturing method of a nanopore embed with a nano-scale gate probe is provided to grasp the location and the arrangement of deoxyribo nucleic acid by analyzing the base sequence after fixing the probe. CONSTITUTION: A manufacturing method of a nanopore embed with a nano-scale gate probe comprises the following steps: inserting a thin conductive film(CL1) in between two parallel dielectric layers(DL2,DL3), capable of reacting with one deoxyribo nucleic acid; and forming a hole capable of passing through only the deoxyribo nucleic acid.