Method of Manufacturing Carbon Nanotube Device Array
摘要
Provided is a method of manufacturing carbon nanotube (CNT) device arrays. In the method of manufacturing CNT device arrays, catalyst patterns may be formed using a photolithography process, CNTs may be grown from the catalyst patterns, and electrodes may be formed on the grown CNTs.
申请公布号
EP2251302(A1)
申请公布日期
2010.11.17
申请号
EP20100155826
申请日期
2010.03.08
申请人
SAMSUNG ELECTRONICS CO., LTD.;SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
发明人
KIM, UN-JEONG;LEE, EUN-HONG;LEE, YOUNG-HEE;LEE, IL-HA