发明名称
摘要 PROBLEM TO BE SOLVED: To carry out cutting without contaminating switches even if an operator's hand is contaminated due to unloading of a plate-like object after cutting in a manual type cutting device wherein detaching/attaching and cutting of the plate-like object are started by the operator by switch operation. SOLUTION: In the cutting device 1 having an attach/detach region cover 200 wherein a chuck table 2 moves between an attach/detach region 20 and a cutting region 10 and which can cover and open/close the region 20, the cutting mode is turned off when cutting of the plate-like object W is finished and the chuck table 2 is positioned at the region 20; the suction state in the chuck table 2 is turned off when the chuck table 2 is positioned in the region 20, and the cover 200 is in its open state from its close state; and suction operation in the chuck table 2 is turned on and the cutting mode is turned on, when the chuck table 2 is located in the region 20 and the cover 200 is in its close state from its open state. Consequently, an operator has not to touch the device except in opening and closing of the cover 200. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP4582693(B2) 申请公布日期 2010.11.17
申请号 JP20040191300 申请日期 2004.06.29
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
地址